ANFF Flagship & Small Process Equipment

Olivier Lem 51698 - SEM-CL / Barrel Etch / Sputter 
Li (Lily) Li 50380 - AFM / EB Evap / FIB / Thermal Evap / Au Coater 
Gayatri Vaidya 59638 - EBL / Hot Embo / NIL Opt / Spinner Fm Hd / Mask Aligner
Naiyin Wang 56242 - ICP / P-ALD / PECVD / all other SPT

ACT Node - Resources Page 

          EBL          
    In-kind EME   
 Ion Beams Labs
      MOCVD       
WiTec SNOW 
XRD Hi Res