Olivier Lem 51698 - SEM-CL / Barrel Etch / Sputter Li (Lily) Li 50380 - AFM / EB Evap / FIB / Thermal Evap / Au Coater Gayatri Vaidya 59638 - EBL / Hot Embo / NIL Opt / Spinner Fm Hd / Mask AlignerNaiyin Wang 56242 - ICP / P-ALD / PECVD / all other SPT
ACT Node - Resources Page
EBL In-kind EME Ion Beams Labs MOCVD WiTec SNOW XRD Hi Res