ANFF Flagship & Small Process Equipment

Olivier Lem x51698 - SEM-CL / Barrel Etch / Sputter 
Li (Lily) Li x50380 - EB Evap / FIB / Thermal Evap / Au Coater 
Gayatri Vaidya x59638 - EBL / Hot Embo / NIL Opt / Spinner Fm Hd / Mask Aligner
Kaushal Vora x51594 - ICP / P-ALD / PECVD / all other SPT

ACT Node - Resources Page 

          EBL          
  Group training  
    In-kind EME   
 Ion Beams Labs
      MOCVD       
WiTec SNOW